Image potentials and the dry etching of submicron trenches with low-energy ions
- Robert J. Davis
- 1991
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Copper exchange plating on palladium and its relation to circuit repair
- R.J. Von Gutfeld
- D.R. Vigliotti
- et al.
- 1991
- Applied Physics Letters
PaperHigh hydrogen concentrations produced by segregation into p+ layers in silicon
- A.D. Marwick
- G.S. Oehrlein
- et al.
- 1991
- Applied Physics Letters
PaperConduction band structure of GexSi1-x using spatially resolved electron energy-loss scattering
- P.E. Batson
- J.F. Morar
- 1991
- Applied Physics Letters
PaperChemical vapor deposition of copper from 1,5-cyclooctadiene copper(I) hexafluoroacetylacetonate
- Scott K. Reynolds
- Christopher J. Smart
- et al.
- 1991
- Applied Physics Letters
PaperPassivation of n and p dopants in ion-implanted GaAs by a 2D+ plasma
- D.K. Sadana
- J.P. De Souza
- et al.
- 1991
- Applied Physics Letters
PaperCentroid shift of γ rays from positron annihilation in the depletion region of metal-oxide-semiconductor structures
- T.C. Leung
- Y. Kong
- et al.
- 1991
- Applied Physics Letters
PaperHigh electron mobility in modulation-doped Si/SiGe
- K. Ismail
- B.S. Meyerson
- et al.
- 1991
- Applied Physics Letters
PaperQuantum interference in ultrashort channel length silicon metal-oxide-semiconductor field-effect transistors
- A. Hartstein
- 1991
- Applied Physics Letters
PaperLow-temperature electron spin resonance investigations of silicon paramagnetic defects in silicon nitride
- W.L. Warren
- F.C. Rong
- et al.
- 1991
- Applied Physics Letters
Paper