Publications

3596 results for Mathematical Sciences

Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Impact of increasing EUV absorption of CAR polymers on lithographic performance
- - Yinjie Cen
  - Emad Aqad
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators
- - Jayoung Koo
  - YunJi Kim
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Disruptive non-fluorinated photoacid generators using computational chemistry and library design
- - P. Labeaume
  - K. Hernandez
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Advanced EUV CAR small molecule compounds design and its impact to etch performance
- - Yinjie Cen
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- - Juliano Borges
  - Hongwen Yan
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Quantum Complexity of the Kronecker Coefficients
- - Sergey Bravyi
  - Anirban Chowdhury
  - et al.
- 2024
- PRX Quantum
Polynomial convergence of iterations of certain random operators in Hilbert space
- - Soumyadip Ghosh
  - Yingdong Lu
  - et al.
- 2024
- Journal of Applied Analysis
Using Cryogenic CMOS Control Electronics to Enable a Two-Qubit Cross-Resonance Gate
- - Devin Underwood
  - Joseph A. Glick
  - et al.
- 2024
- PRX Quantum
A radius valley between migrated steam worlds and evaporated rocky cores
- - Remo Burn
  - Christoph Mordasini
  - et al.
- 2024
- Nature Astronomy