Optical lithography: Introduction
- G. Chiu
- J.M. Shaw
- 1997
- IBM J. Res. Dev
Paper
Publications
26911 results for Science
Defect production, degradation, and breakdown of silicon dioxide films
- D.J. Dimaria
- 1997
- Solid-State Electronics
PaperLight emission during direct and Fowler-Nordheim tunneling in ultra thin MOS tunnel junctions
- E. Cartier
- J.C. Tsang
- et al.
- 1997
- Microelectronic Engineering
PaperIons and atoms in superfluid helium (4He). IV. Temperature dependence of the mobility of alkali earth ions
- M. Foerste
- H. Guenther
- et al.
- 1997
- Zeitschrift fur Physik B-Condensed Matter
PaperNavigating in unfamiliar geometric terrain
- Avrim Blum
- Prabhakar Raghavan
- et al.
- 1997
- SIAM Journal on Computing
PaperImproving the memory-system performance of sparse-matrix vector multiplication
- S. Toledo
- 1997
- IBM J. Res. Dev
PaperTransmission electron microscopy investigations of defects in molecular beam epitaxy-grown oxide films
- E.J. Williams
- A. Daridon
- et al.
- 1997
- Journal of Alloys and Compounds
PaperOverview: The Centre for Advanced Studies
- S.G. Perelgut
- G.M. Silberman
- et al.
- 1997
- IBM Systems Journal
ReviewMicrostructure control in semiconductor metallization
- J.M.E. Harper
- K.P. Rodbell
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ReviewDynamics of poly(vinyl acetate) in bulk and on silica
- Frank D. Blum
- 1996
- Macromolecules
Paper