Reactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas
- O. Joubert
- G.S. Oehrlein
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
24880 results for Exploratory Science
Hot electron scattering effects in metal-semiconductor structures and their role in interface transport
- A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperSi(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- H. Bernhoff
- D. Purdie
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperRole of ions in reactive ion etching
- J.W. Coburn
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperQuantum size effects in ultrathin Cu(100) films
- G.J. Mankey
- R.F. Willis
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperMorphology and bonding measured from boron-nitride powders and films using near-edge x-ray absorption fine structure
- T. Sato
- A. Chaiken
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDeposition of diamondlike carbon using a planar radio frequency induction plasma
- D.L. Pappas
- J. Hod wood
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperSun and surf, superconductors and semiconductors: Summary of the electrochemical society symposuim on low-temperature electronics and high-temperature superconductors
- M.J. Deen
- R.K. Kirschman
- et al.
- 1994
- Cryogenics
Conference paperFluorocarbon high density plasmas. VIII. Study of the ion flux composition at the substrate in electron cyclotron resonance etching processes using fluorocarbon gases
- Gottlieb S. Oehrlein
- Ying Zhang
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperResponses to “theoretical mathematics: Toward a cultural synthesis of mathematics and theoretical physics” by A. Jaffe and F. Quinn
- G.J. Chaitin
- 1994
- Bulletin of the American Mathematical Society
Paper