Computational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
Publications
9292 results for Computer Science
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- Chang An Wang
- Chao-Chun Liang
- et al.
- 2013
- SPIE Advanced Lithography 2013
Monitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
Dynamic QOS optimization architecture for cloud-based DDDAS
- Tao Chen
- Rami Bahsoon
- et al.
- 2013
- ICCS 2013
Directed self-assembly process implementation in a 300mm pilot line environment
- Chi-Chun Liu
- I. Cristina Estrada-Raygoza
- et al.
- 2013
- SPIE Advanced Lithography 2013
Development of KrF hybrid resist for a dual isolation application
- Sen Liu
- Steven Holmes
- et al.
- 2013
- SPIE Advanced Lithography 2013
On the analytical properties of high-dimensional randomization
- Charu C. Aggarwal
- 2013
- IEEE TKDE
Classification and adaptive novel class detection of feature-evolving data streams
- Mohammad M. Masud
- Qing Chen
- et al.
- 2013
- IEEE TKDE
Embedding structural information in simulation-based optimization
- Vidar Gunnerud
- Andrew Conn
- et al.
- 2013
- Computers & Chemical Engineering
Constrained text coclustering with supervised and unsupervised constraints
- Yangqiu Song
- Shimei Pan
- et al.
- 2013
- IEEE TKDE