The C49 to C54 Phase Transformation in TiSi2Thin Films
- L. Clevenger
- R. Mann
- 1994
- JES
Paper
Publications
24904 results for Exploratory Science
Thin Film Transistors with Graded SiNx Gate Dielectrics
- Yue Kuo
- 1994
- JES
PaperLow-temperature phase in lixk1-xtao3
- J. Kohanoff
- U.T. Höchli
- 1994
- Ferroelectrics
PaperSurface chemistry on semiconductors studied by molecular-beam reactive scattering
- Ming L. Yu
- Lisa A. DeLouise
- 1994
- Surface Science Reports
ReviewReactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas
- O. Joubert
- G.S. Oehrlein
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDeposition of diamondlike carbon using a planar radio frequency induction plasma
- D.L. Pappas
- J. Hod wood
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperHot electron scattering effects in metal-semiconductor structures and their role in interface transport
- A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperFluorocarbon high density plasmas. VIII. Study of the ion flux composition at the substrate in electron cyclotron resonance etching processes using fluorocarbon gases
- Gottlieb S. Oehrlein
- Ying Zhang
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperSun and surf, superconductors and semiconductors: Summary of the electrochemical society symposuim on low-temperature electronics and high-temperature superconductors
- M.J. Deen
- R.K. Kirschman
- et al.
- 1994
- Cryogenics
Conference paperSi(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- H. Bernhoff
- D. Purdie
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper