Effect of nonequilibrium deep donors in heterostructure modeling
- Arvind Kumar
- Steven E. Laux
- et al.
- 1993
- Physical Review B
Paper
Publications
24904 results for Exploratory Science
Approximating the noninferior set in multiobjective linear programming problems
- Rajendra S. Solanki
- Perry A. Appino
- et al.
- 1993
- EJOR
PaperCircuit models for 3D structures with incident fields
- A.E. Ruehli
- Jan Garrett
- 1993
- EMC 1993
Conference paperTAR processing for CD control in I-line and 248 nm lithography
- Christopher Lyons
- Nicholas Eib
- et al.
- 1993
- Microlithography 1993
Conference paperRim phase-shift mask combined with off-axis illumination: A path to 0.5Λ/NA geometries
- T.A. Brunner
- 1993
- Microlithography 1993
Conference paperVector diffraction analysis of phase-mask imaging in photoresist films
- Donis G. Flagello
- Alan E. Rosenbluth
- 1993
- Microlithography 1993
Conference paperComparison of scalar and vector diffraction modelling for deep-UV lithography
- Bruce W. Smith
- Donis G. Flagello
- et al.
- 1993
- Microlithography 1993
Conference paper170 nm gates fabricated by phase-shift mask and top anti-reflector process
- T.A. Brunner
- P.N. Sanda
- et al.
- 1993
- Microlithography 1993
Conference paperDevelopments in 2D AFM metrology
- Diana Nyyssonen
- 1993
- Microlithography 1993
Conference paperProcess optimization of APEX-E
- Karen Petrillo
- 1993
- Microlithography 1993
Conference paper