Post-exposure bake as a process-control parameter for chemically-amplffied photoresist
- John L. Sturtevant
- Steven J. Holmes
- et al.
- 1993
- Microlithography 1993
Conference paper
Publications
24904 results for Exploratory Science
A tetrahedral interpolation technique for color space conversion
- James M. Kasson
- Wil Plouffe
- et al.
- 1993
- IS&T/SPIE Electronic Imaging 1993
Conference paperOn the complexity of queries in the logical data model
- Gabriel M. Kuper
- Moshe Y. Vardi
- 1993
- Theoretical Computer Science
PaperSpectral hole-burning of Nd3+-doped heavy metal fluoride glasses
- R.M. Macfarlane
- B. Jacquier
- 1993
- Journal of Non-Crystalline Solids
PaperFinite-model theory - a personal perspective
- 1993
- Theoretical Computer Science
PaperElectrochemical oxidation of La2CuO4 thin films grown by molecular beam epitaxy
- Jean-Pierre Locquet
- Christoph Gerber
- et al.
- 1993
- Applied Physics A Solids and Surfaces
PaperOptimal estimation of linear operators from inaccurate data: A second look
- Charles A. Micchelli
- 1993
- Numerical Algorithms
PaperScale invariance of nonconserved quantities in driven systems
- G. Grinstein
- C. Jayaprakash
- et al.
- 1993
- Physical Review E
PaperSelective dissolution of copper from Au-rich Cu-Au alloys: an electro chemical STM study
- S.J. Chen
- F. Sanz
- et al.
- 1993
- Surface Science
PaperInternal structure of C60 fullerence molecules as revealed by low-temperature STM
- R. Gaisch
- R. Berndt
- et al.
- 1993
- Applied Physics A Solids and Surfaces
Paper