Study of buried interfaces by soft x-ray fluorescence spectroscopy excited by synchrotron radiation
- D.L. Ederer
- J.A. Carlisle
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3553 results for Materials Discovery
Roughening of growing surfaces: Kinetic models and continuum theories
- Albert-László Barabási
- 1996
- Computational Materials Science
PaperCVD of fluorosilicate glass for ULSI applications
- M.J. Shapiro
- S. Nguyen
- et al.
- 1995
- Thin Solid Films
PaperThe chemical vapor deposition of copper and copper alloys
- Pascal Doppelt
- Thomas H. Baum
- 1995
- Thin Solid Films
PaperUV laser deposition of thin films at 248 NM for phase shifting mask repair
- Janos Farkas
- P.B. Comita
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperElectron beam microcolumn for multi-beam applications
- E. Kratschmer
- H.S. Kim
- et al.
- 1995
- IVMC 1995
Conference paperDirectional sputter deposition for semiconductor applications
- S.M. Rossnagel
- 1994
- MRS Fall Meeting 1994
Conference paperIn situ analysis of the formation of thin TiSi2 (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Conference paperLight scattering measurement of surface topography during formation of titanium silicide
- C. Lavoie
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Conference paperParallel simulations of rapid fracture
- F.F. Abraham
- 1995
- MRS Fall Meeting 1995
Conference paper