Fast source independent estimation of lithographic difficulty supporting large scale source optimization
- David Demaris
- Maria Gabrani
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
14466 results for Physical Sciences
Pattern collapse mitigation strategies for EUV Lithography
- Dario L. Goldfarb
- Robert L. Bruce
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperProcess optimization through model based SRAF printing prediction
- Ramya Viswanathan
- Jaione Tirapu Azpiroz
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperLens heating challenges for negative tone develop layers with freeform illumination: A comparative study of experimental vs. simulated results
- Scott Halle
- Michael Crouse
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperHigh performance metal microstructure for carbon-based transparent conducting electrodes
- Amal Kasry
- Mostafa El Ashry
- et al.
- 2012
- Thin Solid Films
PaperTransport properties of a single-molecule diode
- Emanuel Lörtscher
- Bernd Gotsmann
- et al.
- 2012
- ACS Nano
PaperEvaluation of metal-nanowire electrical contacts by measuring contact end resistance
- Hongsik Park
- Roderic Beresford
- et al.
- 2012
- Nanotechnology
PaperToward biodegradable nanogel star polymers via organocatalytic ROP
- Eric A. Appel
- Victor Y. Lee
- et al.
- 2012
- Chemical Communications
PaperCurrent saturation in submicrometer graphene transistors with thin gate dielectric: Experiment, simulation, and theory
- Shu-Jen Han
- Dharmendar Reddy
- et al.
- 2012
- ACS Nano
PaperHigh order wafer alignment in manufacturing
- Michael Pike
- Nelson Felix
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper