Image placement errors in x-ray masks induced by changes in resist stress during electron-beam writing
- R.E. Acosta
- Denise Puisto
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
26934 results for Science
A document recognition system and its applications
- A. Yamashita
- T. Amano
- et al.
- 1996
- IBM J. Res. Dev
PaperA finite number of sub-bands?
- Peter J. Price
- 1996
- Solid-State Electronics
PaperFermi surface and extended van Hove singularity in the non-cuprate layered perovskite superconductor Sr2RuO4
- D.H. Lu
- M. Schmidt
- et al.
- 1996
- Journal of Low Temperature Physics
PaperImplementing OSI agent/managers for TMN
- M. Feridun
- L. Heusler
- et al.
- 1996
- IEEE Communications Magazine
PaperAn xps study of argon ion beam and oxygen rie modified bpda-pda polyimide as related to adhesion
- Richard Flitsch
- Da-Yuan Shih
- 1996
- Journal of Adhesion Science and Technology
PaperElectron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
PaperAtomic mechanism for giant magnetoresistance in layered CrFe
- R.K. Nesbet
- 1996
- Journal of Magnetism and Magnetic Materials
PaperSpeed dependence, takeoff and stiction of a new class of gas bearing sliders
- Ferdinand Hendriks
- 1996
- Tribology Transactions
PaperRole of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition
- I.A. Shareef
- G.W. Rubloff
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper