Bridging CD metrology gaps of advanced patterning with assistance of nanomolding
- Narender Rana
- Dario Goldfarb
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
14465 results for Physical Sciences
Dose-focus monitor technique using CD-SEM and application to local variation analysis
- Shoji Hotta
- Timothy Brunner
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperInvestigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paperEngineering the spin-flip limited exciton dephasing in colloidal CdSe/CdS quantum dots
- Nicolò Accanto
- Francesco Masia
- et al.
- 2012
- ACS Nano
PaperEnhancing water permeability of fouling-resistant POSS-PEGM hydrogels using 'addition-extraction' of sacrificial additives
- Young-Hye La
- Ratnam Sooriyakumaran
- et al.
- 2012
- Journal of Membrane Science
PaperState-of-the-art graphene high-frequency electronics
- Yanqing Wu
- Keith A. Jenkins
- et al.
- 2012
- Nano Letters
PaperMechanochemical models of processive molecular motors
- Ganhui Lan
- Sean X. Sun
- 2012
- Molecular Physics
PaperThe impact of heater-recess and load matching in phase change memory mushroom cells
- Adam Cywar
- Jing Li
- et al.
- 2012
- Nanotechnology
PaperAccuracy of physics-based via models for simulation of dense via arrays
- Sebastian Müller
- Xiaomin Duan
- et al.
- 2012
- IEEE Trans Electromagn Compat
PaperThin-film platinum nanowires as sub-wavelength bolometers
- Pauline Renoux
- Alice Beauny
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paper