Evolution of a 193 nm bilayer resist for manufacturing
- R.W. Kwong
- M. Khojasteh
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Paper
Publications
3608 results for Mathematical Sciences
Enabling the 70 nm technology node with 193 nm altPSM lithography
- Lars Liebmann
- Jennifer Lund
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
PaperApplication of blends and side chain Si-O copolymers as high etch resistant sub 100 nm E-beam resists
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
PaperOn three oscillator universal probes for determining synchronization in arrays of coupled oscillators
- 2002
- International Journal of Bifurcation and Chaos in Applied Sciences and Engineering
PaperQuery strategies for priced information
- Moses Charikar
- Ronald Fagin
- et al.
- 2002
- Journal of Computer and System Sciences
PaperColor document analysis
- Chunghui Kuo
- A. Ravishankar Rao
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
PaperErratum: An approximation algorithm for minimum-cost vertex-connectivity problems
- R. Ravi
- D.P. Williamson
- 2002
- Algorithmica (New York)
PaperMultiple parameter continuation: Computing implicitly defined k-manifolds
- Michael E. Henderson
- 2002
- International Journal of Bifurcation and Chaos in Applied Sciences and Engineering
ReviewThe role of holistic paradigms in handwritten word recognition
- Sriganesh Madhvanath
- Venu Govindaraju
- 2001
- IEEE Transactions on Pattern Analysis and Machine Intelligence
PaperVertex-Ant-Walk - A robust method for efficient exploration of faulty graphs
- Vladimir Yanovski
- Israel A. Wagner
- et al.
- 2001
- Ann. Math. Artif. Intell.
Paper