Use of scatterometric latent image detector in closed loop feedback control of linewldth
- John Sturtevant
- Steve Holmes
- et al.
- 1994
- Microlithography 1994
Conference paper
Publications
26904 results for Science
Sub-nanometer lateral resolution in photon emission from C60 molecules on Au(110)
- R. Berndt
- R. Gaisch
- et al.
- 1994
- Surface Science
PaperDeep levels and band bending at GaP(100) and (110) surfaces
- L.J. Brillson
- I.M. Vitomirov
- et al.
- 1994
- Surface Science
PaperShubnikov-de Haas oscillations under hot-electron conditions in Si/Si1-xGex heterostructures
- G. Stöger
- G. Brunthaler
- et al.
- 1994
- Physical Review B
PaperTheory of high-field electron transport and impact ionization in silicon dioxide
- D. Arnold
- E. Cartier
- et al.
- 1994
- Physical Review B
PaperScheme for an ab initio real-space calculation of the electronic structure in large disordered systems
- Hiroshi Tanaka
- Takeo Fujiwara
- 1994
- Physical Review B
PaperN-scaling algorithm for density-functional calculations of metals and insulators
- E.B. Stechel
- A.R. Williams
- et al.
- 1994
- Physical Review B
PaperOrbital spins of the collective excitations in Hall liquids
- Dung-Hai Lee
- Xiao-Gang Wen
- 1994
- Physical Review B
PaperEffect of interfacial hydrogen in CoSi2/Si(100) Schottky-barrier contacts
- M.O. Aboelfotoh
- A.D. Marwick
- et al.
- 1994
- Physical Review B
PaperHotWire - A visual debugger for C++
- Chris Laffra
- Ashok Malhotra
- 1994
- CTEC 1994
Conference paper