Dose-focus monitor technique using a critical-dimension scanning electron microscope and its application to local variation analysis
- Shoji Hotta
- Timothy Brunner
- et al.
- 2012
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Publications
14465 results for Physical Sciences
Leveler effect and oscillatory behavior during copper electroplating
- Q. Huang
- B.C. Baker-O'Neal
- et al.
- 2012
- JES
PaperElectrolyte additive chemistry and feature size-dependent impurity incorporation for Cu interconnects
- J. Kelly
- Takeshi Nogami
- et al.
- 2012
- JES
PaperAssembly of iron phthalocyanine and pentacene molecules on a graphene monolayer grown on Ru(0001)
- H.G. Zhang
- J.T. Sun
- et al.
- 2011
- Physical Review B - CMMP
PaperMeasurement and analysis of source/drain contact resistance in FinFETs
- Abhisek Dixit
- Nadine Collaert
- et al.
- 2011
- IWPSD 2011
Conference paperCharacterization of silicide-silicon interface contact resistivity using 1-D dual transmission line model approximation of modified cross bridge kelvin measurements
- Ankur Arya
- Balaji Jayaraman
- et al.
- 2011
- IWPSD 2011
Conference paperThree-dimensional a-Si:H solar cells on glass nanocone arrays patterned by self-assembled Sn nanospheres
- Jeehwan Kim
- Augustin J. Hong
- et al.
- 2011
- ACS Nano
PaperOriented assembly of gold nanorods on the single-particle level
- Cyrill Kuemin
- Lea Nowack
- et al.
- 2011
- Advanced Functional Materials
PaperFirst-principles calculations of the structural and dynamical properties of ferroelectric YMnO 3
- Alina Prikockyte
- Daniel Bilc
- et al.
- 2011
- Physical Review B - CMMP
PaperHeat transfer modeling in data centers
- Vanessa López
- Hendrik F. Hamann
- 2011
- Int. J. Heat Mass Transf.
Paper