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- Willard E. Conley
- et al.
- 1992
- Microlithography 1992
Conference paper
Publications
25372 results for Science
Direct phase measurements in phase-shift masks
- A.P. Ghosh
- D.B. Dove
- 1992
- Microlithography 1992
Conference paperAcid generation and acid diffusion in photoresist films
- D.R. McKean
- R.D. Allen
- et al.
- 1992
- Microlithography 1992
Conference paperCritical alignments in plane mirror interferometry
- N. Bobroff
- 1992
- Microlithography 1992
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- W.D. Hinsberg
- Scott A. MacDonald
- et al.
- 1992
- Microlithography 1992
Conference paperApplication of atomic-force microscopy to phase-shift masks
- A.P. Ghosh
- D.B. Dove
- et al.
- 1992
- Microlithography 1992
Conference paperParallel complexity of computing a maximal set of disjoint paths
- Alok Aggarwal
- 1992
- Information Processing Letters
PaperAn abstract theory for the domain reduction method
- C.C. Douglas
- J. Mandel
- 1992
- Computing
PaperA queueing network with a single cyclically roving server
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- Hanoch Levy
- et al.
- 1992
- Queueing Systems
PaperQuantitative oxygen measurements in OMVPE Al x Ga1-x As grown by methyl precursors
- T.F. Kuech
- R.M. Potemski
- et al.
- 1992
- Journal of Electronic Materials
Paper