Publications

26934 results for Science

Fluorocarbon high density plasmas. VIII. Study of the ion flux composition at the substrate in electron cyclotron resonance etching processes using fluorocarbon gases
- - Gottlieb S. Oehrlein
  - Ying Zhang
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Quantum size effects in ultrathin Cu(100) films
- - G.J. Mankey
  - R.F. Willis
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Reactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas
- - O. Joubert
  - G.S. Oehrlein
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Role of ions in reactive ion etching
- - J.W. Coburn
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Hot electron scattering effects in metal-semiconductor structures and their role in interface transport
- - A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Responses to “theoretical mathematics: Toward a cultural synthesis of mathematics and theoretical physics” by A. Jaffe and F. Quinn
- - G.J. Chaitin
- 1994
- Bulletin of the American Mathematical Society
Paper
Modification of the PHI sample mount for multiple- or micropositioning for Zalar rotation
- - Paul Soo
  - David L. Neiman
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Optimal motion control for teleoperated surgical robots
- - Janez Funda
  - Russell Taylort
  - et al.
- 1993
- SPIE Optical Tools for Manufacturing and Advanced Automation 1993
Conference paper
GaAs, AlGaAs, and InGaAs epilayers containing As clusters: Semimetal/semiconductor composites
- - M.R. Melloch
  - J. Woodall
  - et al.
- 1993
- Materials Science and Engineering B
Paper
UPS at the beginning
- - C.R. Brundle
- 1993
- Journal of Electron Spectroscopy and Related Phenomena
Paper