14460 results for
Physical Sciences- E. Cartier
- Andreas Kerber
- et al.
- 2011
- IEDM 2011
Conference paper
- A. Annunziata
- M.C. Gaidis
- et al.
- 2011
- IEDM 2011
Conference paper
- M. Yamaoka
- Hiroshi Miki
- et al.
- 2011
- IEDM 2011
Conference paper
- X. Yu
- Oleg Gluschenkov
- et al.
- 2011
- IEDM 2011
Conference paper
- Naoko Unami
- Hirokazu Noma
- et al.
- 2011
- APM 2011
Conference paper
- Shu-Jen Han
- Alberto Valdes-Garcia
- et al.
- 2011
- IEDM 2011
Conference paper
- Andrew H. Simon
- Frieder H. Baumann
- et al.
- 2011
- ADMETA 2011
Conference paper
- Shafaat Ahmed
- Kathleen B. Reuter
- et al.
- 2011
- Advanced Energy Materials
Paper
- Amr Abdo
- Ramya Viswanathan
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Conference paper
- Gregory McIntyre
- Christian Zuniga
- et al.
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Conference paper