Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi2 MOS process
- T.E. Karlin
- S.-L. Zhang
- et al.
- 1993
- Applied Surface Science
Paper
Publications
26903 results for Science
Diffusion of elements implanted in amorphous titanium disilicide
- F.M. d'Heurle
- J.M. Cotte
- et al.
- 1993
- Applied Surface Science
PaperThe influence of silicon substrate crystallinity and doping on TiSi2 thin film morphology
- T.E. Karlin
- S. Nygren
- et al.
- 1993
- Applied Surface Science
PaperMoment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique
- M. Surendra
- M. Dalvie
- 1993
- Physical Review E
PaperSurface phonons on Bi2Sr2CaCu2O8+δ
- R.B. Phelps
- P. Akavoor
- et al.
- 1993
- Physical Review B
PaperNMR and magnetization studies of orthorhombic distortion of Co in a (110)-oriented Co/Pt superlattice
- K. Le Dang
- P. Veillet
- et al.
- 1993
- Physical Review B
PaperProperties of superconducting p-n junctions
- J. Mannhart
- A.W. Kleinsasser
- et al.
- 1993
- Physica C: Superconductivity and its applications
PaperAttractive Hubbard model in the strong-coupling regime. Relation between transition temperature, magnetic penetration depth and gap
- T. Schneider
- H. Beck
- et al.
- 1993
- Physica C: Superconductivity and its applications
PaperMott transition in an anyon gas
- Wei Chen
- Matthew P. A. Fisher
- et al.
- 1993
- Physical Review B
PaperEvolution of the space-charge layer during electrochemical deposition with convection
- Vincent Fleury
- James Kaufman
- et al.
- 1993
- Physical Review E
Paper