Atomic layer epitaxy of silicon by dichlorosilane studied with core level spectroscopy
- J.A. Yarmoff
- D.K. Shuh
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
25372 results for Science
Scanning tunneling microscopy study of the adsorption and recombinative desorption of hydrogen from the Si(100)-2x 1 surface
- John J. Boland
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperReactivity of a fluorine passivated silicon surface
- Ruud A. Haring
- Michael Liehr
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperInitial stage oxidation of the Ge:Si(111)-(5×5) and Ge:Si(111)-(7X7) surfaces
- R. Cao
- F. Bozso
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperElectron-sheath interaction in capacitive radio-frequency plasmas
- D. Vender
- R.W. Boswell
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperSurface and interface states for GaAs(100) (1x1) and (4x2)-c(8x2) reconstructions
- I.M. Vitomirov
- A. Raisanen
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperNucleation and growth of ultrathin Fe and Au films on Cu(100) studied by scanning tunneling microscopy
- D.D. Chambliss
- R.J. Wilson
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperStudy particle emission in vacuum from film deposits
- Joseph S. Logan
- James J. McGill
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperAn isotope approach to characterization of microwave water plasma modified polyimide surfaces
- N.J. Chou
- A.D. Marwick
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOn distinguishing between two aerosol-size distributions
- Douglas W. Cooper
- 1992
- Aerosol Science and Technology
Paper