Interferometer for phase measurements in phase shift masks
- Derek B. Dove
- Trieu C. Chieu
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- 1992
- BACUS Symposium on Photomask Technology and Management 1992
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Publications
26903 results for Science
The chemisorption and reaction of GeCl4 with Si(100)
- D.A. Lapiano-Smith
- F.R. McFeely
- 1993
- Thin Solid Films
PaperAtomic layer doping for Si
- D.A. Grützmacher
- K. Eberl
- et al.
- 1993
- Thin Solid Films
PaperPotential Si atomic layer epitaxy processes using halogenated Si precursors
- D.D. Koleske
- S. Gates
- et al.
- 1993
- Thin Solid Films
PaperDopants on Si(100) surfaces: useful probes of silicon atomic layer epitaxy?
- S. Gates
- D.D. Koleske
- 1993
- Thin Solid Films
PaperA model for the atomic layer epitaxy of GaAs
- Ming L. Yu
- 1993
- Thin Solid Films
PaperAmic acid doping of polyaniline: Characterization and resulting blends
- Marie Angelopoulos
- Niranjan Patel
- et al.
- 1993
- Synthetic Metals
PaperThree-Dimensional Vectorial Beam Propagation Method for Anisotropic Medium
- Olivier J.F. Martin
- Rolf Clauberg
- et al.
- 1993
- IPR 1993
Conference paperSub-Angstrom Planar Channel-Dropping Filters
- M. Levy
- L. Eldada
- et al.
- 1993
- IPR 1993
Conference paperAb initio valence-bond cluster model for ionic solids: Alkaline-earth oxides
- A. Lorda
- F. Illas
- et al.
- 1993
- Physical Review B
Paper