Role of gas phase reactions in silicon chemical vapor deposition from monosilane
- B.A. Scott
- R.D. Estes
- 1989
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Ultrafast imaging of ultraviolet laser ablation and etching of polymethylmethacrylate
- R. Srinivasan
- Bodil Braren
- et al.
- 1989
- Applied Physics Letters
PaperNovel self-aligned W/TiN/TiSi2 contact structure for very shallow junctions and interconnections
- R.V. Joshi
- D. Moy
- et al.
- 1989
- Applied Physics Letters
PaperMagnetoreflectivity study of excitons in (Zn,Co)Se epilayers
- X. Liu
- A. Petrou
- et al.
- 1989
- Applied Physics Letters
PaperMagnetic force microscopy of thin Permalloy films
- H.J. Mamin
- D. Rugar
- et al.
- 1989
- Applied Physics Letters
PaperFormation of palladium silicide in the presence of Al with and without a carbon barrier layer
- Chin-An Chang
- 1989
- Applied Physics Letters
PaperReaction of trimethylgallium in the atomic layer epitaxy of GaAs (100)
- Ming L. Yu
- Ulrich Memmert
- et al.
- 1989
- Applied Physics Letters
PaperSchottky diodes on hydrogen plasma treated n-GaAs surfaces
- A. Paccagnella
- A.C. Callegari
- et al.
- 1989
- Applied Physics Letters
PaperScanning capacitance microscopy on a 25 nm scale
- C.C. Williams
- W.P. Hough
- et al.
- 1989
- Applied Physics Letters
PaperSelective epitaxy in the conventional metalorganic vapor phase epitaxy of GaAs
- T.F. Kuech
- M.A. Tischler
- et al.
- 1989
- Applied Physics Letters
Paper