Chemical amplification for the design of sensitive E-beam and X-ray resist systems
- Hiroshi Ito
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Conference paper
Publications
24902 results for Exploratory Science
Photochemically-induced acid-catalyzed polymer reactions for microlithography
- Hiroshi Ito
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Conference paperSynthesis, characterization, and lithographic behavior of methylated poly(4-hydroxystyrene)
- D.R. McKean
- T.P. Sauer
- et al.
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Conference paperStructural studies of reversible piezochromism in poly(alkylsilanes)
- J.F. Rabolt
- K. Song
- et al.
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Conference paperEndmarkers can make a difference
- Moshe Y. Vardi
- 1990
- Information Processing Letters
PaperLow-energy electron diffraction study of multilayer relaxation on a Pb{001} surface
- R.F. Lin
- Y.S. Li
- et al.
- 1990
- Physical Review B
PaperR.F. diode sputtering
- Joseph S. Logan
- 1990
- Thin Solid Films
PaperInteractions between extended and localized states in superlattices
- F. Agulla-Rueda
- E. Mendez
- et al.
- 1990
- Physical Review B
PaperValidity, accuracy, and efficiency of multiple-scattering theory for space-filling scatterers
- W.H. Butler
- R.K. Nesbet
- 1990
- Physical Review B
PaperConductance fluctuations in large metal-oxide-semiconductor structures in the variable-range hopping regime
- Dragana Popović
- A.B. Fowler
- et al.
- 1990
- Physical Review B
Paper