Morphology and bonding measured from boron-nitride powders and films using near-edge x-ray absorption fine structure
- T. Sato
- A. Chaiken
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
3555 results for Materials Discovery
Reactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas
- O. Joubert
- G.S. Oehrlein
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperSi(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- H. Bernhoff
- D. Purdie
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperFluorocarbon high density plasmas. VIII. Study of the ion flux composition at the substrate in electron cyclotron resonance etching processes using fluorocarbon gases
- Gottlieb S. Oehrlein
- Ying Zhang
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperRole of ions in reactive ion etching
- J.W. Coburn
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperHot electron scattering effects in metal-semiconductor structures and their role in interface transport
- A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperQuantum size effects in ultrathin Cu(100) films
- G.J. Mankey
- R.F. Willis
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDeposition of diamondlike carbon using a planar radio frequency induction plasma
- D.L. Pappas
- J. Hod wood
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperModification of the PHI sample mount for multiple- or micropositioning for Zalar rotation
- Paul Soo
- David L. Neiman
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGaAs, AlGaAs, and InGaAs epilayers containing As clusters: Semimetal/semiconductor composites
- M.R. Melloch
- J. Woodall
- et al.
- 1993
- Materials Science and Engineering B
Paper