Large area plasma enhanced chemical vapor deposition of nonstoichiometric silicon nitride
- Y. Kuo
- 1992
- MRS Proceedings 1992
Conference paper
Publications
26898 results for Science
Low temperature selective area chemical vapor deposition of gold films: Growth and characterization
- P.F. Seidler
- S.P. Kowalczyk
- et al.
- 1992
- MRS Proceedings 1992
Conference paperEffects of ion implantation on crystallization of amorphous CoSi2
- Q.Z. Hong
- K. Barmak
- et al.
- 1992
- MRS Proceedings 1992
Conference paperErbium-doped silicon prepared by UHV/CVD
- D.B. Beach
- R.T. Collins
- et al.
- 1992
- MRS Proceedings 1992
Conference paperChemical vapor deposition of copper alloys
- C. Smart
- S.K. Reynolds
- et al.
- 1992
- MRS Proceedings 1992
Conference paperAlgorithms for a fast confocal optical inspection system
- A.Ravishankar Rao
- N. Ramesh
- et al.
- 1992
- WACV 1992
Conference paperInfluence of local magnetization on transport in Cd0.91Mn0.09Te:In
- S. von Molnar
- T. Penney
- et al.
- 1992
- Symposium on Dynamics in Small Confining Systems 1992
Conference paperMicrostructural evolution and substrate selectivity in PECVD μc-Si
- G.N. Parsons
- J.J. Boland
- et al.
- 1992
- Symposium on Dynamics in Small Confining Systems 1992
Conference paperAnalytical electron microscopy of thin films and interfaces
- R.H. Geiss
- 1992
- Thin Solid Films
PaperDetection and refractive index identification of submicron particles on surfaces
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- SPIE Applications in Optical Science and Engineering 1992
Conference paper