High order wafer alignment in manufacturing
- Michael Pike
- Nelson Felix
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
9271 results for Computer Science
Investigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paperDose-focus monitor technique using CD-SEM and application to local variation analysis
- Shoji Hotta
- Timothy Brunner
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperSAPSC: Security architecture of private storage cloud based on HDFS
- Qingni Shen
- Yahui Yang
- et al.
- 2012
- AINA 2012
Conference paperEnhanced rail component detection and consolidation for rail track inspection
- Hoang Trinh
- Norman Haas
- et al.
- 2012
- WACV 2012
Conference paperMultimodal ranking for non-compliance detection in retail surveillance
- Hoang Trinh
- Sharath Pankanti
- et al.
- 2012
- WACV 2012
Conference paperQuery planning for continuous aggregation queries over a network of data aggregators
- Rajeev Gupta
- Krithi Ramamritham
- 2012
- IEEE TKDE
PaperSecuring inductively-coupled communication
- Lav R. Varshney
- Pulkit Grover
- et al.
- 2012
- ITA 2012
Conference paperThin-film platinum nanowires as sub-wavelength bolometers
- Pauline Renoux
- Alice Beauny
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Conference paperPredicting query performance by query-drift estimation
- Anna Shtok
- Oren Kurland
- et al.
- 2012
- ACM TOIS
Paper