High-rate reactive sputter deposition of aluminum oxide
- Fletcher Jones
- Joseph Logan
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
25372 results for Science
Optical emission in magnetrons: Nonlinear aspects
- S.M. Rossnagel
- K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperElectron spin resonance study of metal-nitride-silicon structures: Observation of Si dangling bonds with different configurations and trapping properties in silicon nitride
- D. Jousse
- Jerzy Kanicki
- et al.
- 1989
- Applied Surface Science
PaperA study of voids in sputtered Si02
- Mitchell J. Hait
- Harris C. Jones
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAnalysis of block-paging strategies
- W.H. Tetzlaff
- Martin G. Kienzle
- et al.
- 1989
- IBM J. Res. Dev
PaperEnergetic particle bombardment of films during magnetron sputtering
- S.M. Rossnage
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperNanolithography at 350 KV in a TEM
- A.N. Broers
- A.E. Timbs
- et al.
- 1989
- Microelectronic Engineering
PaperChemical and physical modification of fluoropolymer surfaces for adhesion enhancement: A review
- Lorraine M. Siperko
- Richard R. Thomas
- 1989
- Journal of Adhesion Science and Technology
PaperSimulated annealing type Markov chains and their order balance equations
- D.P. Connors
- P.R. Kumar
- 1989
- SICON
PaperNeutron scattering study of NH4- and acid proton "freezing" in Rb1-x(NH4)xH2PO4
- H. Grimm
- E. Courtens
- et al.
- 1989
- Physica B: Physics of Condensed Matter
Paper