Extendibility of Cu damascene to 0.1 μm wide interconnections
- C.-K. Hu
- K.Y. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper
Publications
22 results at MRS Spring Meeting 1998
Corrosion protection of Cu, Fe, Mn and Co surfaces
- J.E.E. Baglin
- A.J. Kellock
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperIs selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperDynamic coercivity and thermal decay of magnetic media
- K.A. Rubin
- Jason Goldberg
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperHigh conductivity gate metallurgy for TFT/LCD's
- P.M. Fryer
- E.G. Colgan
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperElectrical test sites for AMLCD-TFT array process characterization
- E.G. Colgan
- R.J. Polastre
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperTemplating nanoporosity in organosilicates using well-defined branched macromolecules
- J.L. Hedrick
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperReliability and copper interconnections with low dielectric constant materials
- C.-K. Hu
- 1998
- MRS Spring Meeting 1998
Conference paperIntegration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperProperties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper