Is selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper
Publications
22 results at MRS Spring Meeting 1998
Stress-corrosion cracking of spin-on glass thin films
- R.F. Cook
- E. Liniger
- 1998
- MRS Spring Meeting 1998
Conference paperProperties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperTemplating nanopores into poly(methylsilsesquioxane): new low-dielectric coatings suitable for microelectronic applications
- J. Remenar
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperThickness dependent perpendicular magnetic domain patterns in sputtered epitaxial FePt(001) L10 films
- J.-U. Thiele
- L. Folks
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperTemplating nanoporosity in organosilicates using well-defined branched macromolecules
- J.L. Hedrick
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperIntegration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperDynamic coercivity and thermal decay of magnetic media
- K.A. Rubin
- Jason Goldberg
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperReliability and copper interconnections with low dielectric constant materials
- C.-K. Hu
- 1998
- MRS Spring Meeting 1998
Conference paperExperimental and theoretical study of structure-dielectric property relationships for polysilsesquioxanes
- Sung Mog Kim
- D.Y. Yoon
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper