Publications

14 results at MRS Spring Meeting 1996

Residual stress and lattice distortion mapping of patterned devices which failed electromigration testing using the microbeam X-ray diffraction (MXRD) technique
- - B.R. York
  - H.L. Pfizenmayer
  - et al.
- 1996
- MRS Spring Meeting 1996
Conference paper
Dependence of crystallographic texture of C54 TiSi₂ on thickness and linewidth in submicron CMOS structures
- - V. Svilan
  - K.P. Rodbell
  - et al.
- 1996
- MRS Spring Meeting 1996
Conference paper
Nanofoam porosity measured by infrared spectroscopy and refractive index
- - M.I. Sanchez
  - J.L. Hedrick
  - et al.
- 1996
- MRS Spring Meeting 1996
Conference paper
Copper migration and precipitate dissolution in aluminum/copper lines during electromigration testing
- - T.M. Shaw
  - C.-K. Hu
  - et al.
- 1996
- MRS Spring Meeting 1996
Conference paper