Publications

9263 results for Computer Science

The Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- - Eric A. Joseph
  - Nathan Marchack
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Invited talk
Neural Reasoning Networks: Efficient interpretable neural networks with automatic textual explanations
- - Steve Carrow
  - Kyle Harper Erwin
  - et al.
- 2025
- AAAI 2025
Poster
Uncertainty Analysis in Predicting Molecular Properties Using Chemical Foundation Models
- - Siya Kunde
  - Emilio Ashton Vital Brazil
  - et al.
- 2025
- AAAI 2025
Workshop paper
LLM Assisted Anomaly Detection Service for Site Reliability Engineers: Enhancing Cloud Infrastructure Resilience
- - Nimesh Jha
  - Shuxin Lin
  - et al.
- 2025
- AAAI 2025
Workshop paper
Docling: An Efficient Open-Source Toolkit for AI-driven Document Conversion
- - Nikos Livathinos
  - Christoph Auer
  - et al.
- 2025
- AAAI 2025
Workshop paper
Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- - EuiJin Ko
  - YooRim Jang
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
The Impact of Polymer Compositional Homogeneity on Lithography and Defects
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
New Photoacid Generators Designed for Advanced EUV Patterning
- - Kamal P. Pandey
  - Emad Aqad
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
New Molecular Resist Design for Advanced Patterning
- - Vageesha Liyana Gunawardana
  - Emad Aqad
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- - KwangMo Choi
  - YunJi Kim
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper