Surface reactions in Si chemical vapor deposition from silane
- S.K. Kuikarni
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
26941 results for Science
Lithographic Processing of Polymers Using Plasma-Generated Electron Beams
- Lumin Li
- Jayaram Krishnaswamy
- et al.
- 1990
- IEEE Transactions on Plasma Science
PaperPicosecond photoemission probing of integrated circuits. Capabilities, limitations, and applications
- R. Clauberg
- H. Beha
- et al.
- 1990
- IBM J. Res. Dev
PaperProcess effects on radio frequency diode reactively sputtered ZrO2films
- M.M. Yang
- T.M. Reith
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffect of atomic size on the minimum X-ray absorption coefficient in the six-beam Borrmann diffraction
- R.E. Feldman
- T.C. Huang
- 1990
- Solid State Communications
PaperThermoelastic effects on x-ray lithography masks under pulsed irradiation
- Iqbal Shareef
- Juan R. Maldonado
- et al.
- 1990
- Microelectronic Engineering
PaperAn optical study of phase transitions of poly (ethylene terephthalate‐co‐p‐hydroxybenzoic acid) liquid crystal
- Tong Sun
- Subrata K. Bhattacharya
- et al.
- 1990
- Journal of Polymer Science, Part B: Polymer Physics
PaperTrellis-Coded Multidimensional Phase Modulation
- Daniel J. Costello
- 1990
- IEEE Trans. Inf. Theory
PaperOxygen mobility in YBa2Cu3O7-δ: A Raman study
- Gerald Burns
- F.H. Dacol
- et al.
- 1990
- Solid State Communications
PaperShear and time-dependent rheology of a fully nematic thermotropic liquid crystalline copolymer
- Douglass S. Kalika
- David W. Giles
- et al.
- 1990
- Journal of Rheology
Paper