integrated thermal chemical vapor deposition processing for Si technology
- M. Liehr
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Growth of CoSi2on Si(001): Structure, defects, and resistivity
- R.D. Thompson
- S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDensity dependence of the electrochemical characteristics of carbon overcoated thin film media
- Grace L. Gorman
- John Duran
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDefect microchemistry in Si02/Si structures
- G.W. Rubloff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSurface diffractometry and lattice imaging of scanning tunneling microscopy images
- J.E. Demuth
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperComposition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSurface reactions in Si chemical vapor deposition from silane
- S.K. Kuikarni
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMolecular beam studies of trapping dynamics
- W.H. Weinberg
- C.B. Mullins
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperReaction kinetics of surface silicon hydrides
- C. Michael Greenlief
- Stephen M. Gates
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDetermination of the local electronic structure of atomic-sized defects on Si(001) by tunneling spectroscopy
- R.J. Hamers
- U.K. Köhler
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper