AML as a plant floor language
- David Grossman
- 1985
- Robotics and Computer Integrated Manufacturing
Paper
Publications
24861 results for Exploratory Science
Summary Abstract: Chemical processes in fluorine-based etching reactions
- F.R. McFeely
- 1985
- JVSTA
PaperSummary Abstract: Titanium silicide films prepared by reactive sputtering
- V. Deline
- F.M. d’Heurle
- 1985
- JVSTA
PaperThe value of multiple independent robot arms
- David D. Grossman
- Roger C. Evans
- et al.
- 1985
- Robotics and Computer Integrated Manufacturing
PaperThe etching of W(111) with XeF2
- Harold F. Winters
- 1985
- JVSTA
PaperSummary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si
- M.L. Yu
- D.J. Vitkavage
- et al.
- 1985
- JVSTA
PaperPERSONAL INSTRUMENT (PI) - A PC-BASED SIGNAL PROCESSING SYSTEM.
- G. Shichman
- 1985
- IBM J. Res. Dev
PaperSummary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMS
- D.J. Vitkavage
- J.G. Clabes
- et al.
- 1985
- JVSTA
PaperIn depth generation lifetime profiling of heat‐treated czochralski silicon
- D. Braunig
- K.H. Yang
- et al.
- 1985
- physica status solidi (a)
PaperWhy the close-packed Ni(111) surface dissociatively chemisorbs oxygen and nucleates oxide faster than the more open Ni(100) surface
- C.R. Brundle
- 1985
- JVSTA
Paper