Characterization of plasma-enhanced chemically-vapor-deposited silicon-rich silicon dioxide/thermal silicon dioxide dual dielectric systems
- S. Yokoyama
- D.W. Dong
- et al.
- 1983
- Journal of Applied Physics
Paper
Publications
2360 results at Journal of Applied Physics
Charge transport and trapping phenomena in off-stoichiometric silicon dioxide films
- D.J. DiMaria
- D.W. Dong
- et al.
- 1983
- Journal of Applied Physics
PaperInvestigation of the Al/TiSi2/Si contact system
- Chung Yu Ting
- Marc Wittmer
- 1983
- Journal of Applied Physics
PaperSilicon-oxygen complexes containing three oxygen atoms as the dominant thermal donor species in heat-treated oxygen-containing silicon
- G.S. Oehrlein
- 1983
- Journal of Applied Physics
PaperThe effect of stress relief on magnetic distributions in ion-implanted garnet films
- S. Shiomi
- C.C. Shir
- 1983
- Journal of Applied Physics
PaperPhoto-deep level transient spectroscopy: A technique to study deep levels in heavily compensated semiconductors
- P.M. Mooney
- 1983
- Journal of Applied Physics
PaperPhotolithography experiments using forced Rayleigh scattering
- M. Levenson
- 1983
- Journal of Applied Physics
PaperHeavy doping of GaAs and AlGaAs with silicon by molecular beam epitaxy
- M. Heiblum
- W.I. Wang
- et al.
- 1983
- Journal of Applied Physics
PaperHydrogen migration under avalanche injection of electrons in Si metal-oxide-semiconductor capacitors
- R. Gale
- F.J. Feigl
- et al.
- 1983
- Journal of Applied Physics
PaperInteraction between chromium oxide and chromium silicide
- A. Cros
- R.A. Pollak
- et al.
- 1983
- Journal of Applied Physics
Paper