Publications

3553 results for Materials Discovery

Nucleation and growth of silicon on Si02 during SiH4 low pressure chemical vapor deposition as studied by hydrogen desorption titration
- - M. Liehr
  - S.S. Dana
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Plasma particulate contamination control. II. Self-cleaning tool design
- - Gary S. Selwyn
  - Edward F. Patterson
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Spin superlattice formation in ZnSe-based diluted magnetic semiconductor heterostructures
- - B.T. Jonker
  - W.C. Chou
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Surface analysis studies of copper chemical vapor deposition from 1,5-cyclooctadiene-copper(l)-hexafluoroacetylacetonate
- - Susan L. Cohen
  - Michael Liehr
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Molecular electronics on the virgin islands
- - Ari Aviram
- 1992
- Advanced Materials
Conference paper
Atmospheric pressure chemical vapor deposition of Si and SiGe at low temperatures
- - T.O. Sedgwick
  - P. Agnello
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Dopant diffusion in silicides: Effect of diffusion paths
- - Carol Stanis
  - J.M. Cotte
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Atomic layer epitaxy of silicon by dichlorosilane studied with core level spectroscopy
- - J.A. Yarmoff
  - D.K. Shuh
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Surface damage threshold of Si and Si02 in electron-cyclotron-resonance plasmas
- - Young H. Lee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Initial stage oxidation of the Ge:Si(111)-(5×5) and Ge:Si(111)-(7X7) surfaces
- - R. Cao
  - F. Bozso
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper