Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
26944 results for Science
Thermodynamic fluctuations in the superconductor Y1Ba2Cu3O9-: Evidence for three-dimensional superconductivity
- P. Freitas
- C.C. Tsuei
- et al.
- 1987
- Physical Review B
PaperImaging electronic surface states in real space on the Si(111) 2x1 surface
- Joseph A Stroscio
- R.M. Feenstra
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Transmission electron microscopy studies of the microstructure of AuNiGe ohmic contact to n-type GaAs
- Yih-Cheng Shih
- E.L. Wilkie
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCharge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperParamagnetic resonance of Cu2+ ions in the superconductor Y0.2Ba0.8CuOx
- F. Mehran
- S.E. Barnes
- et al.
- 1987
- Physical Review B
PaperSummary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Observation of final-state screening in inverse photoemission from adsorbed xenon layers
- B. Reihl
- K.H. Frank
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInvestigation of inas and gasb by high-resolution electron energy-loss spectroscopy
- P.A. Thiry
- J.L. Longueville
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper