The use of organosilicon polymers in multilayer plasma resist processing
- J. Paraszczak
- E. Babich
- et al.
- 1987
- Microelectronic Engineering
Paper
Publications
26878 results for Science
Evidence for electron-electron correlations in La2CuO4 and La2-xSrxCuO4 superconductors
- R.L. Greene
- H. Maletta
- et al.
- 1987
- Solid State Communications
PaperVacancy ordering in Gd1-xSe
- T. Siegrist
- Y. Le Page
- et al.
- 1987
- Journal of Solid State Chemistry
PaperSliding contact stresses in a two-dimensional layered elastic half-space
- R.B. King
- T.C. O'sullivan
- 1987
- Int. J. Solids Struct.
PaperOn fault tolerant routings in general networks
- David Peleg
- Barbara Simons
- 1987
- Information and Computation
PaperThermal donors and carbonoxygen defects in silicon
- J.L. Lindström
- H. Weman
- et al.
- 1987
- physica status solidi (a)
PaperKinetic theory of laser photochemical deposition
- C. Julian Chen
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThermally depolymerizable polycarbonates v. Acid catalyzed thermolysis of allylic and benzylic polycarbonates: A new route to resist imaging
- Jean M. J. Fréchet
- Francine Bouchard
- et al.
- 1987
- Polymer Journal
PaperThe acid catalyzed cyclization of diazoketones: Preparation of 2,4(3H,5H) furandiones
- R.D Miller
- W Theis
- 1987
- Tetrahedron Letters
PaperElectron paramagnetic resonance of Mn4+ in BaTiO3
- K.A. Müller
- W. Berlinger
- et al.
- 1987
- Solid State Communications
Paper