Study of silicon contamination and near-surface damage caused by CF 4/H2 reactive ion etching
- G.S. Oehrlein
- R.M. Tromp
- et al.
- 1984
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Exact description and data fitting of ion-implanted dopant profile evolution during annealing
- R. Ghez
- G.S. Oehrlein
- et al.
- 1984
- Applied Physics Letters
PaperReduction of electron and hole trapping in SiO2 by rapid thermal annealing
- Z.A. Weinberg
- D.R. Young
- et al.
- 1984
- Applied Physics Letters
Paper12-fs ultrashort optical pulse compression at a high repetition rate
- J.-M. Halbout
- D. Grischkowsky
- 1984
- Applied Physics Letters
PaperMeasurement of small elastic anisotropy in solids using laser-induced ultrasonic pulses
- A.C. Tam
- W.P. Leung
- 1984
- Applied Physics Letters
PaperEfficient visible photoluminescence in the binary a-Si:Hx alloy system
- D.J. Wolford
- J.A. Reimer
- et al.
- 1983
- Applied Physics Letters
PaperDetermination of the anisotropic potential at the nematic liquid crystal-to-wall interface
- K.H. Yang
- Charles Rosenblatt
- 1983
- Applied Physics Letters
PaperPhotoacoustic generation and detection of 10-ns acoustic pulses in solids
- A.C. Tam
- H. Coufal
- 1983
- Applied Physics Letters
PaperQuantitative ion beam process for the deposition of compound thin films
- J.M.E. Harper
- J.J. Cuomo
- et al.
- 1983
- Applied Physics Letters
Paper12× pulse compression using optical fibers
- B. Nikolaus
- D. Grischkowsky
- 1983
- Applied Physics Letters
Paper