Overlay characterization and matching of immersion photoclusters
- Blandine Minghetti
- Timothy Brunner
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
14465 results for Physical Sciences
Predicting and reducing substrate induced focus error
- Bernhard Liegl
- Brian Sapp
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperThe feasibility of using image parameters for test pattern selection during OPC model calibration
- Amr Abdo
- Ramya Viswanathan
- 2010
- SPIE Advanced Lithography 2010
Conference paperSpacer defined double patterning for sub-72 nm pitch logic technology
- Ryoung-Han Kim
- Erin McLellan
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperOrganocatalysis: Opportunities and challenges for polymer synthesis
- Matthew K. Kiesewetter
- Eun Ji Shin
- et al.
- 2010
- Macromolecules
ReviewSynthesis and size-dependent crystallization of colloidal germanium telluride nanoparticles
- Marissa A. Caldwell
- Simone Raoux
- et al.
- 2010
- Journal of Materials Chemistry
PaperDomain-wall spin-torque resonators for frequency-selective operation
- S. Lepadatu
- O. Wessely
- et al.
- 2010
- Physical Review B - CMMP
PaperA simple approach for describing metal-supported cyclohexaphenylene dehydrogenation: Hybrid classical/DFT metadynamics simulations
- Carlo Pignedoli
- Teodoro Laino
- et al.
- 2010
- European Physical Journal B
PaperCombined local microchannel-scale CFD modeling and global chip scale network modeling for electronics cooling design
- R. Wälchli
- Thomas Brunschwiler
- et al.
- 2010
- Int. J. Heat Mass Transf.
PaperUltralow nanoscale wear through atom-by-atom attrition in silicon-containing diamond-like carbon
- Harish Bhaskaran
- Bernd Gotsmann
- et al.
- 2010
- Nature Nanotechnology
Paper