Surface analysis of realistic semiconductor microstructures
- Gottlieb S. Oehrlein
- Kevin K. Chan
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- Gottlieb S. Oehrlein
- J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe chemical interaction of Mn with the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- Jeffrey R. Lince
- Thomas B. Stewart
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperNucleation of new solid phases from chemical interactions at an interface
- F.M. Heurle
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperIn situ laser diagnostic studies of plasma-generated particulate contamination
- G.S. Selwyn
- J. Singh
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperPlasma characterization for a divergent field electron cyclotron resonance source
- John Forster
- William Holber
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA He and Ne diffraction study of the W(100) phase transition
- E. Schweizer
- C.T. Rettner
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEnergetic particle bombardment of films during magnetron sputtering
- S.M. Rossnage
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA process for improved Al (Cu) reactive ion etching
- C.-K. Hu
- B. Canney
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMixed-metal-oxide planar optical waveguides
- G. Arjavalingam
- Michael A. Russak
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper