Phase change memory technology
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- et al.
- 2010
- Journal of Vacuum Science and Technology B
Paper
Publications
14460 results for Physical Sciences
Ion beam patterning of block copolymer thin films
- Ranulfo Allen
- John Baglin
- et al.
- 2010
- J. Photopolym. Sci. Tech.
PaperStructural properties of epitaxial SrHfO3 thin films on Si (001)
- Monica Sawkar-Mathur
- Chiara Marchiori
- et al.
- 2010
- Thin Solid Films
PaperEstimation of amorphous fraction in multilevel phase-change memory cells
- 2010
- Solid-State Electronics
PaperSilane decomposition on Cu interconnects inhibited by ammonia
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- Steven Molis
- et al.
- 2010
- JES
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- Brian Sapp
- et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
PaperPolymer- and lipid-based nanoparticle therapeutics for the treatment of liver diseases
- Lanjuan Li
- Huaying Wang
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- 2010
- Nano Today
ReviewCu CMP edge uniformity improvement studies for 32 nm technology node and beyond
- John H. Zhang
- Laertis Economikos
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- 2010
- MRS Online Proceedings Library
Conference paperAmorphization of crystalline phase change material by ion implantation
- Simone Raoux
- Guy M. Cohen
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperEffect of TaN stoichiometry on barrier oxidation and defect density in 32nm Cu/ultra-low K interconnects
- Andrew H. Simon
- Frieder Baumann
- et al.
- 2010
- MRS Online Proceedings Library
Conference paper