Cu CMP edge uniformity improvement studies for 32 nm technology node and beyond
- John H. Zhang
- Laertis Economikos
- et al.
- 2010
- MRS Online Proceedings Library
Conference paper
Publications
14460 results for Physical Sciences
Fabrication of prototype magnetic coupled spin-torque devices for non-volatile logic applications
- Larkhoon Leem
- James S. Harris
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperReducing time dependent line to line leakage following post CMP clean
- Donald F. Canaperi
- Satyavolu S. Papa Rao
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperEffect of TaN stoichiometry on barrier oxidation and defect density in 32nm Cu/ultra-low K interconnects
- Andrew H. Simon
- Frieder Baumann
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperDetecting oxygen vacancies in SrTiO3 by 3d transition-metal tracer ions
- B.P. Andreasson
- M. Janousch
- et al.
- 2009
- Physical Review B - CMMP
PaperStructure, growth kinetics, and ledge flow during vapor-solid-solid growth of copper-catalyzed silicon nanowires
- Cheng-Yen Wen
- Mark C. Reuter
- et al.
- 2009
- Nano Letters
PaperAngle dependence of the interface magnetic configuration in a model antiferromagnetically coupled ferrimagnetic/ferrimagnetic bilayer GdFe/TbFe
- S. Mangin
- L. Thomas
- et al.
- 2009
- Physical Review B - CMMP
PaperOptimization of CIGS-based PV device through antimony doping
- Min Yuan
- David B. Mitzi
- et al.
- 2009
- Chemistry of Materials
PaperLarge-scale arrays of aligned single viruses
- Daniel J. Solis
- Sean R. Coyer
- et al.
- 2009
- Advanced Materials
PaperEffect of confinement on the mesoscale and macroscopic swelling of thin block copolymer films
- Ute Zettl
- Armin Knoll
- et al.
- 2009
- Langmuir
Paper