Lithographic qualification of new opaque MoSi binary mask blank for the 32-nm node and beyond
- Greg McIntyre
- Michael Hibbs
- et al.
- 2010
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Publications
14465 results for Physical Sciences
Polymer- and lipid-based nanoparticle therapeutics for the treatment of liver diseases
- Lanjuan Li
- Huaying Wang
- et al.
- 2010
- Nano Today
ReviewEpitaxial Dy2O3 thin films grown on Ge(100) substrates by molecular beam epitaxy
- Md. Nurul Kabir Bhuiyan
- Mariela Menghini
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperAmorphization of crystalline phase change material by ion implantation
- Simone Raoux
- Guy M. Cohen
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperCu CMP edge uniformity improvement studies for 32 nm technology node and beyond
- John H. Zhang
- Laertis Economikos
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperInfluence of bottom contact material on the selective chemical vapor deposition of crystalline GeSbTe alloys
- Alejandro G. Schrott
- Chieh-Fang Chen
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperReducing time dependent line to line leakage following post CMP clean
- Donald F. Canaperi
- Satyavolu S. Papa Rao
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperFabrication of prototype magnetic coupled spin-torque devices for non-volatile logic applications
- Larkhoon Leem
- James S. Harris
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperEffect of TaN stoichiometry on barrier oxidation and defect density in 32nm Cu/ultra-low K interconnects
- Andrew H. Simon
- Frieder Baumann
- et al.
- 2010
- MRS Online Proceedings Library
Conference paperDetecting oxygen vacancies in SrTiO3 by 3d transition-metal tracer ions
- B.P. Andreasson
- M. Janousch
- et al.
- 2009
- Physical Review B - CMMP
Paper