SMO photomask inspection in the lithographic plane
- Emily Gallagher
- Karen Badger
- et al.
- 2009
- SPIE Photomask Technology + EUV Lithography 2009
Conference paper
Publications
14465 results for Physical Sciences
A non-iterative compact model for carbon nanotube FETs incorporating source exhaustion effects
- Lan Wei
- David J. Frank
- et al.
- 2009
- IEDM 2009
Conference paperExtremely thin SOI (ETSOI) CMOS with record low variability for low power system-on-chip applications
- K. Cheng
- A. Khakifirooz
- et al.
- 2009
- IEDM 2009
Conference paperTrigate 6T SRAM scaling to 0.06 μm2
- M. Guillorn
- J. Chang
- et al.
- 2009
- IEDM 2009
Conference paperA stochastic process algebraic abstraction of detection evidence fusion in tactical sensor networks
- David J. Thornley
- Duncan F. Gillies
- et al.
- 2009
- SPIE Defense, Security, and Sensing 2009
Conference paperDevelopment of graphene FETs for high frequency electronics
- Yu-Ming Lin
- Keith Jenkins
- et al.
- 2009
- IEDM 2009
Conference paperFermi level depinning at metal-organic semiconductor interface for low-resistance ohmic contacts
- Zihong Liu
- Masaharu Kobayashi
- et al.
- 2009
- IEDM 2009
Conference paperTechnologies to further reduce soft error susceptibility in SOI
- P. Oldiges
- R.H. Dennard
- et al.
- 2009
- IEDM 2009
Conference paperUnderstanding mobility mechanisms in extremely scaled HfO2 (EOT 0.42 nm) using remote interfacial layer scavenging technique and V t-tuning dipoles with gate-first process
- T. Ando
- M.M. Frank
- et al.
- 2009
- IEDM 2009
Conference paperUnderstanding amorphous states of phase-change memory using frenkel-poole model
- Y.H. Shih
- M.H. Lee
- et al.
- 2009
- IEDM 2009
Conference paper