Polymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
Paper
Publications
24897 results for Exploratory Science
Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- D.W. Dong
- E.A. Irene
- et al.
- 2019
- JES
PaperFabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- Michael J. Brady
- 2019
- JES
PaperPlasma Oxide FET Devices
- A. Ray
- A. Reisman
- 2019
- JES
PaperThe Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
PaperCopolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
PaperParameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- L.M. Ephrarh
- D.J. Dimaria
- et al.
- 2019
- JES
PaperTitanium Dioxide Films to Improve Photoresist Adhesion
- John C. Marinace
- Ralph C. McGibbon
- 2019
- JES
PaperDirect Evidence for 1 nm Pores in “Dry” Thermal SiO2 from High Resolution Transmission Electron Microscopy
- J.M. Gibson
- D.W. Dong
- 2019
- JES
PaperDry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
Paper