Self-improving algorithms
- Nir Ailon
- Bernard Chazelle
- et al.
- 2011
- SIAM Journal on Computing
Paper
Publications
9271 results for Computer Science
Towards optimal range medians
- Gerth Stølting Brodal
- Beat Gfeller
- et al.
- 2011
- Theoretical Computer Science
PaperReconciling measurements in AFM reference metrology when using different probing techniques
- Narender Rana
- Charles Archie
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperOverlay improvement roadmap: Strategies for scanner control and product disposition for 5-nm overlay
- 2011
- SPIE Advanced Lithography 2011
Conference paperAdaptive optimization in the Jalapeño JVM
- Matthew Arnold
- Stephen Fink
- et al.
- 2011
- ACM SIGPLAN Notices
PaperRevisit pattern collapse for 14nm node and beyond
- Kenji Yoshimoto
- Craig Higgins
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperBound PAG resists: An EUV and electron beam lithography performance comparison of fluoropolymers
- Luisa D. Bozano
- Phillip J. Brock
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperCritical challenges for "non-critical" layers
- J.M. Gomez
- I.Y. Popova
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperVisualization of the develop process
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperPerformance of tri-layer process required for 22nm and beyond
- Yayi Wei
- Martin Glodde
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper