The importance of free radical recombination reactions in CF4 /02 plasma etching of silicon
- K.F. Jensen
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3549 results for Materials Discovery
Surface intervalley scattering on GaAs(110) studied with picosecond laser photoemission
- R. Haight
- J.A. Silberman
- 1990
- Applied Surface Science
A study of modified polyimide surfaces as related to adhesion
- D-Y. Shih
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Bonding at silicon/insulator interfaces
- F.J. Himpsel
- T.F. Heinz
- et al.
- 1990
- Applied Surface Science
Surface reactions in Si chemical vapor deposition from silane
- S.K. Kuikarni
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning probe microscopy: Current status and future trends
- H. Kumar Wickramasinghe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nanomechanics of a Au-lr contact using a bidirectional atomic force microscope
- Sidney R. Cohen
- Gabi Neubauer
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High rate radio frequency sputtering using in-phase plasma confinement
- James E. Lucy
- John Costable
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Growth of CoSi2on Si(001): Structure, defects, and resistivity
- R.D. Thompson
- S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Atomic structure of alkali metal overlayers on the Si(001) surface
- Inder P. Batra
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films