Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3553 results for Materials Discovery
Growth of CoSi2on Si(001): Structure, defects, and resistivity
- R.D. Thompson
- S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSurface photovoltage on Si(111)-(7x7) probed by optically pumped scanning tunneling microscopy
- R.J. Hamers
- K. Markert
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperTa as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperX-ray reflectivity study of Si02on Si
- A.A. Bright
- G.W. Rubioff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInfluence of superimposed hydrostatic pressure on bending fracture and formability of a low carbon steel containing globublar sulfides
- A.S. Kao
- H.A. Kuhn
- et al.
- 1990
- Journal of Engineering Materials and Technology, Transactions of the ASME
PaperAdhesion studies of metals on fluorocarbon polymer films
- Chin-An Chang
- Yong-Kil Kim
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperKinetics of physical adsorption of ethane on lr(110)-(1 × 2): Molecular beam reflectivity measurements and Monte Carlo simulations
- W.H. Weinberg
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperNanomechanics of a Au-lr contact using a bidirectional atomic force microscope
- Sidney R. Cohen
- Gabi Neubauer
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffects of interfacial microstructure on ohmic contacts to GaAs
- Masanori Murakami
- H.-J. Kim
- et al.
- 1990
- Applied Surface Science
Paper