Reactive ion etching of silicon using bromine containing plasmas
- Tim D. Bestwick
- Gottlieb S. Oehrlein
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3549 results for Materials Discovery
Process effects on radio frequency diode reactively sputtered ZrO2films
- M.M. Yang
- T.M. Reith
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High-temperature crystal structures of orthorhombic and rhombohedral PrNiO3
- T.C. Huang
- W. Parrish
- et al.
- 1990
- Materials Research Bulletin
Surface photovoltage on Si(111)-(7x7) probed by optically pumped scanning tunneling microscopy
- R.J. Hamers
- K. Markert
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Inverse photoemission from semiconductors
- F.J. Himpsel
- 1990
- Surface Science Reports
Thermal roughening studied by scanning tunneling microscopy
- J.W.M. Frenken
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion studies of metals on fluorocarbon polymer films
- Chin-An Chang
- Yong-Kil Kim
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ plasma contamination measurements by HeNe laser light scattering: A case study
- J.S. Mckillop
- Kurt L. Haller
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gap optimization and homogenization of an externally pressurized air bearing
- Michel P. Robert
- Ferdinand Hendriks
- 1990
- Tribology Transactions