Molecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3555 results for Materials Discovery
Adhesion of Polyimides to Ceramic Substrates: Role of Acid-Base Interactions
- T.S. Oh
- J. Kim
- et al.
- 1990
- Journal of Adhesion Science and Technology
PaperAdhesion studies of metals on fluorocarbon polymer films
- Chin-An Chang
- Yong-Kil Kim
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHigh rate radio frequency sputtering using in-phase plasma confinement
- James E. Lucy
- John Costable
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe physical description of films coating quartz resonators
- K.Keiji Kanazawa
- 1990
- Thin Solid Films
PaperProgress and issues of phase-change erasable optical recording media
- Kurt A Rubin
- Martin Chen
- 1989
- Thin Solid Films
PaperSome mechanics for the adhesion of thin films
- M.D Thouless
- 1989
- Thin Solid Films
PaperOn the possibility of two-dimensional growth of GaAs on atomically flat Si(100) surfaces
- Efthimios Kaxiras
- J.D. Joannopoulos
- 1989
- Surface Science
PaperMaterial transformations in semiconductor and magnetic thin films
- E.E. Marinero
- 1989
- Applied Surface Science
PaperBroadband low-reflectivity coating for semiconductor power lasers by ion-beam and PECVD deposition
- E. Marclay
- D.J. Webb
- et al.
- 1989
- Applied Surface Science
Paper