Removal of Fluorocarbon Residues on CF4/H2 Reactive-ion-Etched Silicon Surfaces Using a Hydrogen Plasma
- J. Simko
- G.S. Oehrlein
- et al.
- 2019
- JES
Paper
Publications
24860 results for Exploratory Science
Monitoring the Growth of an Oxide Film on Aluminum In Situ with the Quartz Crystal Microbalance
- Owen R. Melroy
- 2019
- JES
PaperIn Situ Scanning Tunneling Microscopy of Copper Deposition with Benzotriazole
- Rolf H. Muller
- 2019
- JES
PaperSubstituent Effect on Para-Substituted n-phenylpyrrole Monomers and Their Polyheterocyclic Conductors
- M.C. Rock
- Ma. Eugenia Carbajal
- et al.
- 2019
- JES
PaperX-Ray Absorption Study of Electrochemically Grown Oxide Films on Al-Cr Sputtered Alloys: I. Ex situ Studies
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
PaperInterface Properties of Hydrogenated Amorphous Carbon Films on Ge(100) Surfaces
- M. Wittmer
- D. Ugolini
- et al.
- 2019
- JES
PaperCritical angles for channeling of boron ions implanted into single-crystal silicon
- Chanahae Park
- Kevin M. Klein
- et al.
- 2019
- JES
PaperRedeposition during Deep Trench Etching
- Jacob Jorne
- 2019
- JES
PaperEquilibrium Carrier Density and Solubility of Antimony in Silicon
- D. Nobili
- R. Angelucci
- et al.
- 2019
- JES
PaperElectrical Conduction in Surfactant-Water-Nonaqueous Liquid Systems
- V. Novotny
- 2019
- JES
Paper